ME60135: Micro Electro Mechanical Systems (Mems)
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| ME60135 | |||||||||||||||||||||||
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| Course name | Micro Electro Mechanical Systems (Mems) | ||||||||||||||||||||||
| Offered by | Mechanical Engineering | ||||||||||||||||||||||
| Credits | 4 | ||||||||||||||||||||||
| L-T-P | 4-0-0 | ||||||||||||||||||||||
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| Semester | Autumn | ||||||||||||||||||||||
Syllabus
Syllabus mentioned in ERP
Micro Electro Mechanical Systems (MEMS)Introduction, History, Development and need of Micro-Electro-Mechanical Systems. Overview of MEMS technology, Different electro-physical processes used for machining dealing with MEMS materials; relevant non-conventional processes; IC fabrication processes used for MEMS; MEMS sensors and actuators; Mechanical process techniques and process models for micro-machining; Fabrication processes and design of the process sequences; Agile Prototyping of design and manufacturing processes in micromachining and computer based design; Reliability and process control of micro manufacturing processes; Introduction and exposure to nano technology processes and systems.
Concepts taught in class
Student Opinion
How to Crack the Paper
Classroom resources
Additional Resources
Time Table
| Day | 8:00-8:55 am | 9:00-9:55 am | 10:00-10:55 am | 11:00-11:55 am | 12:00-12:55 pm | 2:00-2:55 pm | 3:00-3:55 pm | 4:00-4:55 pm | 5:00-5:55 pm | |
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| Monday | ME306 | |||||||||
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