ME60306: Precision And Micro Manufacturing

ME60306
Course name	Precision And Micro Manufacturing
Offered by	Mechanical Engineering
Credits	3
L-T-P	3-0-0
Previous Year Grade Distribution
1 2 1 EX A B C D P F
Semester	Spring

Syllabus

Syllabus mentioned in ERP

INTRODUCTION: basic definition, size scales, scaling analysis, technology change, Lithographic Processes- Optical and X-ray. PRECISION ENGINEERING AND PRACTICES: Definitions, Sources Of Error, Basic Concepts Of Machining, Machine Tool Variables- accuracy, stiffness, spindle vibration, flatness, straightness, and smoothness of motion, 1-2 DOF systems, Feedback Variables, Cutting Tool Variables, Workpiece Variables, Environment Effects and Thermal Errors. INTRODUCTION TO MACHINING ANALYSIS: geometry of Cutting Edge, Energy Models, Comparison with Micro-scale Machining. DIAMOND MICROMACHINING: Introduction, Diamond as a Tool Material, Compatible Materials, Diamond Performance, Diamond Machining, Micro-mechanical Applications, Diamond Machining as a Micro-mechanical Process Research Method, Ductile Regime Grinding MICRO-ECM, MICRO-EDM etc. MICROMILLING: Micro-milling Tools, Process Results and Micro-milling Applications- micro-mechanically milled X-ray masks, micro-milled mask materials, Mask Absorption Quantification, Exposure Quantification. MICRODRILLING: Micro-drilling and Macro-drilling Techniques. LASER MICROMACHINING: laser Optics, Laser Ablation, Heat Affected Zone and Laser Polymerisation. LIGA, S-LIGA Micro welding: Micro welding in similar and dissimilar materials; welding processes like ultrasonic, EB, LB; applications. Micro casting: Casting processes like vacuum, semi-solid state; applications Processing of Integrated Circuits, Clean rooms, crystal growing and shaping of wafers, Etching, Photo and other lithography techniques, Impurity introduction, Thermal oxidation, CVD, Metallisation etc. IC packaging