Syllabus

PH60106
Course name	Semiconductor Device Technology
Offered by	Physics
Credits	3
L-T-P	3-0-0
Previous Year Grade Distribution
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Semester	Spring

Syllabus mentioned in ERP

Semiconductor materials, their properties, crystal growth and wafer preparation, defects. Epitaxy vapor phase and molecular beam expitaxy, silicon on insulator. Oxidation processes â growth kinetics. Lithography âoptical, e-beam, X-ray, ion beam micro and nano lithography. Plasma processing-fundamental aspects, plasma etching and deposition. Diffusion processes. Ion implantation. Metallization and packaging. Yield and Reliability. VLSI and ULSI process integration.

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